C05300 - SEMI C53 - Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2] StdDcs-Current The use of AFM for

The use of AFM for measuring the roughness of polymer surfaces is outlined in this test method

Due to the migration to large substrate sizes in FPD production

and valves)

These dimensions apply to pellicle for masks that are principally used in fabricating flat panel displays

本スタンダードは，Liquid Chemicals Global Technical Committeeで技術的に承認されている。現版は2014年8月25日，global Audits and Reviews Subcommitteeにて発行が承認された。2014年11月にwww

C05300 - SEMI C53 - Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2] StdDcs-Current The use of AFM forNOTICE: This Document was reapproved with minor editorial changes. The purpose of this Document is to standardize requirements for dimethyl sulfoxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Referenced SEMI Standards SEMI C1 Guide for the Analysis of Liquid Chemicals