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The scope of this Document covers cyclopentanone which is used in the semiconductor industry
originally published in 1983
The International System of Units (SI) is used as the standard unit of measure in this Document
originally published March 2001
This specification was technically approved by the Global Flat Panel Display – Equipment Committee and is the direct responsibility of the North American Flat Panel Display Committee
C00326 - SEMI C3.26 - Specification for Tungsten Hexafluoride (WF6) in Cylinders, 99.8% Quality StdTpc-Process Chemicals - Miscellaneous The scope of this DocumentNOTICE: This Document was balloted and approved for withdrawal in 2011. It was replaced by SEMI C70. Tungsten hexafluoride is a colorless gas or colorless liquid. It is shipped as a liquefied gas under its own vapor pressure. Referenced SEMI Standards (purchase separately) None. Revision History SEMI C3. 26 0301 (Withdrawn 0312, replaced by SEMI C70) SEMI C3. 26 0301 (technical revision) SEMI C3. 26 94 (technical revision) SEMI C3. 26 93 (technical
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