E13000 - SEMI E130 - Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) Revision:SEMI E130-0618 (Reapproved 0723) - Current 8 — Guide for High

8 — Guide for High Purity and Ultrahigh Purity Gas Distribution Systems in Semiconductor Manufacturing Equipment

This Test Method defines an evaluation method for EFFU which is installed inside an enclosed space to remove particles that are generated inside process equipment

SEMI MF671 — Test Method for Measuring Flat Length on Wafers of Silicon and Other Electronic Materials

Hydrogen chloride is a colorless

SEMI D29-1101 (first published)

E13000 - SEMI E130 - Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) Revision:SEMI E130-0618 (Reapproved 0723) - Current 8 — Guide for HighThis Standard establishes a Prober Specific Equipment Model for prober equipment deployed in a factory adhering to the Global Joint Guidance for 300 mm Standards (PSEM300). The PSEM300 consists of equipment characteristics and behaviors that apply to this class of equipment and are required to be implemented. The intent of this Standard is to facilitate the integration of prober equipment into an automated semiconductor factory. This Standard