M06300 - SEMI M63 - 化合物半導体エピタキシャルウェーハに使用するサファイア基板の仕様 Revision:SEMI M63-0306 - Superseded NOTICE: This Document was reapproved

Name: M06300 - SEMI M63 - 化合物半導体エピタキシャルウェーハに使用するサファイア基板の仕様 Revision:SEMI M63-0306 - Superseded NOTICE: This Document was reapproved
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Description

NOTICE: This Document was reapproved with minor editorial changes

SEMI E5-0308 (technical revision)

本方法では，切断ストリップリードフレームの標準的な機械的測定技術を概説する。

The purpose of the Object Services Standard (OSS) is to provide general terminology

It was available at www

M06300 - SEMI M63 - 化合物半導体エピタキシャルウェーハに使用するサファイア基板の仕様 Revision:SEMI M63-0306 - Superseded NOTICE: This Document was reapprovedglobal Compound Semiconductor Materials Committee2006116global Audits and Reviews Subcommittee20062www. semi. org20063CD ROM E20068R2 2 Referenced SEMI Standards None.

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