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to be published September 1999
本スタンダードは，global Gases Technical Committeeで技術的に承認されている。現版は2011年12月24日，global Audits and Reviews Subcommitteeにて発行が承認された。2012年2月にwww
SEMI C28-0699 (first published - replaces SEMI C1
and (Method C) Surface Haze
SEMI C93-0522 (technical revision)
C05900 - SEMI C59 - Specification for Nitrogen Revision:SEMI C59-1104 - Superseded to be published September 1999This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www. semiviews. org and www. semi. org in March 2017; originally published November 2002; previously published February 2011. The purpose of this Document is to provide a series of specifications for different grades of nitrogen (N2) that are used in
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