E17100 - SEMI E171 - Specification for Predictive Carrier Logistics (PCL) Revision:SEMI E171-0916 - Superseded SEMI E21 — Cluster Tool

SEMI E21 — Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard

The purpose of this Standard is to provide a communication method which observes and/or controls every single wafer (including its related information) on equipment individually (and independently rather than a member of a lot) through single management point from the host

start of construction

5 µ or less (0

SEMI M35 — Guide for Developing Specifications for Silicon Wafer Surface Features Detected by Automated Inspection

E17100 - SEMI E171 - Specification for Predictive Carrier Logistics (PCL) Revision:SEMI E171-0916 - Superseded SEMI E21 — Cluster ToolThe purpose of this Standard is to provide a communication scheme for exchanges of carrier logistics related information, especially predictive information, between equipment and the factory system in order to support seamless cascading of carriers for continuous processing of equipment in semiconductor fabrication systems or similar ones. The purpose of this Standard is to provide models which represent carrier logistics management status in