PV09100 - SEMI PV91 - Specification for Trichlorosilane Used in Polysilicon Production StdPbc-1107 For reference purposes

For reference purposes

This Specification may be applied to manufacturing process

and patterned wafers

SEMI F48-0600 (technical revision)

and without hysteresis phenomenon due to capacity effect

PV09100 - SEMI PV91 - Specification for Trichlorosilane Used in Polysilicon Production StdPbc-1107 For reference purposesThe purpose of this Document is to provide specifications for different grades of trichlorosilane that are used in polysilicon industry. With the growth of the photovoltaic market, the customers demand for quality of polysilicon is extremely high. Trichlorosilane is one of the critical raw materials of polysilicon production. The impurity content in trichlorosilane may directly impact the quality of polysilicon. The standard for trichlorosilane is to