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SEMI E133-0705 (technical revision)
41 — Standard for Oxygen (O2)
SEMI E142-0224 (technical revision)
previously published March 2010
except on the transparent display and HDR display
E12100 - SEMI E121 - Guide for Style and Usage of XML for Semiconductor Manufacturing Applications Revision:SEMI E121-0304 - Superseded SEMI E133-0705 (technical revision)The inclusion of eXtensible Markup Language (XML) notation within current SEMI Standards reflects the industrys growing interest in XML technology. This Guide is the first step to prepare for XML protocols in SEMI Standards and to establish consistency in XML style and usage. Recommendations given in this Document are intended for the definition and conformance of XML based standards. This Document also attempts to highlight those areas where
