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SEMI P40-1103 (first published)
The surface characterization tests to be performed are specified herein
circular sample is addressed in the discussion and examples
subject to all other applicable SEMI specifications
more reliable execution times
MS00800 - SEMI MS8 - Guide to Evaluating Hermeticity of Microelectromechanical Systems (MEMS) Packages Revision:SEMI MS8-0309 (Reapproved 0622) - Current SEMI P40-1103 (first published)Microelectromechanical systems (MEMS) are miniaturized systems requiring packaging for environmental protection and for interconnection. While there are a wide range of MEMS devices, a common need is for packaging that allows movement of the internal device during operation. This is in contrast to the typical integrated circuit that requires only that the device be protected from the environment and that appropriate interconnections are made. In many
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