M01600 - SEMI M16 - Specification for Polycrystalline Silicon Revision:SEMI M16-1110 (Reapproved 1015) - Superseded • Load port assignment

• Load port assignment

maintain equipment

SEMI E125 — Specification for Equipment Self Description (EqSD)

This Standard specifies XML structures required to encode message header or ‘envelope’ information for synchronous and asynchronous messages

本仕様は，半導体パワー用デバイス／IC製造用のシリコン・オン・インシュレーター（SOI）ウェーハに関する要求条件を規定している。試験方法と受入基準を定義することによって，ユーザとサプライヤの両者は製品の特性と品質に関する要求条件を明確にすることができる。

M01600 - SEMI M16 - Specification for Polycrystalline Silicon Revision:SEMI M16-1110 (Reapproved 1015) - Superseded • Load port assignmentThis Specification is intended for use in procurement of polycrystalline silicon for growth of electronic grade monocrystalline silicon ingots. Such ingots are sliced into wafers that are subsequently used for the production of semiconductor devices, integrated circuits, and other microelectronic components including microelectromechanical systems (MEMS). This Specification covers requirements for polycrystalline silicon (poly) used to produce single