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注意：SEMI E98は，SEMI E98
SEMI E121 — Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
SEMI P5 — Specification for Pellicles
This Document describes the procedures for testing the leak integrity
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P04500 - SEMI P45 - Specification for Job Deck Data Format for Mask Tools Revision:SEMI P45-0421 - Current 注意：SEMI E98は，SEMI E98This Document defines the common job deck data format specifications for mask tools, namely MALY. MALY specification applies to the input data format for mask tools. Referenced SEMI Standards (purchase separately) SEMI P39 Specification for OASIS Open Artwork System Interchange Standard SEMI P44 Specification for Open Artwork System Interchange Standard (OASIS) Specific to Mask Tools Revision History SEMI P45 0421 (technical revision) SEMI P45 1218
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