P03500 - SEMI P35 - Terminology for Microlithography Metrology StdVol-HB-LED and 22 nm (Table R1-3)

and 22 nm (Table R1-3) device technology generations

and delivery of the transfer unit

SEMI E48-95 (first published)

SEMI E157-0710 (first published)

orgで。初版は1993年発行，前版は2000年2月に発行された。

P03500 - SEMI P35 - Terminology for Microlithography Metrology StdVol-HB-LED and 22 nm (Table R1-3)This Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at www. semiviews. org and www. semi. org in September 2013. Originally published February 2000; previously published November 2006. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status