E03700 - SEMI E37 - HSMS의 일반적 서비스(HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES) Revision:SEMI E37-0413 - Superseded SEMI E62-1105 (technical revision)

SEMI E62-1105 (technical revision)

inspection procedures and acceptance criteria

SEMI D77-0618 (Reapproved 0224)

• Switch placement volume in which load port operation switch should be placed

Since the area of irregularly-shaped chunks

E03700 - SEMI E37 - HSMS의 일반적 서비스(HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES) Revision:SEMI E37-0413 - Superseded SEMI E62-1105 (technical revision)Global Information & Control Technical Committee , 2012 12 20 Global Audits and Reviews Subcommittee . 1995 2008 7 . 2013 4 www. semi. org . NOTICE : This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. , , . krstandards@semi. org . NOTICE: The designation of SEMI E37 was updated during the 0413