D03000 - SEMI D30 - FPDカラーフィルタの耐光性試験方法 StdPbc-0811 ellipsometry is to be applied

ellipsometry is to be applied for integrated metrology equipment

4  This Practice provides a basis for quantifying SSIS performance as used in related standards concerned with parameters such as sensitivity

This Test Method is complementary to:

• the cylinder preparation process and in-situ reactions of diborane with the internal surface of the cylinder

This Test Method defines the measurement method of surface hardness of FPD components excluding glass

D03000 - SEMI D30 - FPDカラーフィルタの耐光性試験方法 StdPbc-0811 ellipsometry is to be appliedNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Flat Panel Display Color Filter & Optical Elements Committee2007515global Audits and Reviews Subcommittee20076www. semi. org200111 FPD FPD FPD Referenced SEMI Standards SEMI D19 Test Method for Chemical Resistance of FPD Color