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超純水（UPW）
SEMI C30-0218 (technical revision)
from virgin substrates to fully patterned substrates
SEMI E113-0306 (Reapproved 0518)
start of construction
E16900 - SEMI E169 - Guide for Equipment Information System Security Revision:SEMI E169-0615 - Superseded 超純水（UPW）The purpose of this Standard is to establish a common basis for equipment information system security. This can be shared among users and suppliers of semiconductor manufacturing equipment, suggesting concepts, and measures of information security. This Standard is expected to: Provide guidelines of applying appropriate security measures for equipment to optimize cost, delivery, and reliability. Make the design of user security systems easier and more
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