A00100 - SEMI A1 - Specification for Production Equipment Smart Connection Interface (PESCI) StdPbc-0226 and 3) back sheet and

and 3) back sheet and back surface layer

orgで，そして2009年11月にCD-ROMで入手可能となる。初版は2006年11月発行，前版は2008年11月に発行された。

It specifies the general characteristics of 200 and 300 mm notched SOI wafers

the attributes of the epitaxial layer are not included the specification requirements

This Guide contains the following sections:

A00100 - SEMI A1 - Specification for Production Equipment Smart Connection Interface (PESCI) StdPbc-0226 and 3) back sheet and* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1