P00500 - SEMI P5 - Specification for Pellicles StdPbc-0415 • Power supply and connector

• Power supply and connector

Flow Curve

本スタンダードでは，フレキシブルディスプレイ用のプラスチック基板に関する各用語について定義しそれを解釈することでフレキシブルディスプレイの製造において利用される材料・指標を提供するものとする。

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This Practice does not deal with acquisition or analysis of uniformity data where it is desired to take more than one measurement per specified spatial cell such as is commonly done for wafer site flatness measurements

P00500 - SEMI P5 - Specification for Pellicles StdPbc-0415 • Power supply and connectorThis Specification covers the general requirements for pellicles used on photomasks or reticles in photolithographic exposure systems. This Specification covers pellicles for use in either broadband, polychromatic or monochromatic exposure systems. Referenced SEMI Standards (purchase separately) None. Revision History SEMI P5 0416 (Reapproved 1221) SEMI P5 0416 (technical revision) SEMI P5 0704 (technical revision) SEMI P5 94 (Reapproved 1103) SEMI P5