F06800 - SEMI F68 - Test Method for Determining Purifier Efficiency Revision:SEMI F68-1101 (Reapproved 1108) - Superseded The purpose of this Document

The purpose of this Document is to standardize the method for measurement of electrical and optical characteristics of cold cathode fluorescent lamp (CCFL)

·    Robots and factory interfaces

The model specified in this Specification is used in conjunction with SEMI E54

SEMI E154 — Specification for Mechanical Features of 450 mm Load Port

出荷管理 (STC) 限界を規定および維持する目的で，プロセスデータから統計的に導かれる限界値を定量的に決定するためのガイドラインを提示する。

F06800 - SEMI F68 - Test Method for Determining Purifier Efficiency Revision:SEMI F68-1101 (Reapproved 1108) - Superseded The purpose of this DocumentThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at www. semiviews. org and www. semi. org in July 2013; originally published November 2001; previously published November 2008. The purpose of this document is to define a test method to quantify the efficiency of a purifier for removal of an active gaseous