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E03900 - SEMI E39 - Specification for Object Services: Concepts, Behavior, and Services SEMIViews This Document defines the method

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Description

This Document defines the method of FPD glass substrate surface roughness measurement by stylus method surface roughness measurement instrument

SEMI 3D4-0613 (first published)

an automated approach to fabrication of suitable test structures using standard tools available in modern wafer fabs

orgで入手可能となる。初版は1995年発行。前版は2002年11月発行。

org in March 2017

E03900 - SEMI E39 - Specification for Object Services: Concepts, Behavior, and Services SEMIViews This Document defines the methodThe purpose of the Object Services Standard (OSS) is to provide general terminology, conventions, and notation for describing behavior and data in terms of objects and object attributes. In addition, it provides basic services for reading object attributes, setting their values, and for asking for an objects contents. This Standard is intended to be referenced by other Standards which define specific objects to reduce redundancy. The scope of this

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