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The significance of the accuracy calculations in this method is to allow an MFC user to transfer a process from one manufacturing tool to another and to exchange MFCs within a single manufacturing tool while maintaining process control
SEMI E128-0524 (technical revision)
本文件包含下列章節：
1 This Specification provides a standardized behavior for host view communication with production equipment during the coordination
the procedure described gives the unconstrained value of sori
G09000 - SEMI G90 - Specification for 300 mm Wafer Coin-Stack Type Shipping Container Used for Test and Packaging Processes StdPbc-1113 The significance of the accuracyThe purpose of this Standard is to standardize the specifications for 300 mm wafer coin stack type shipping container used for test and packaging processes for wafers. This Specification defines the dimensions of container (refer to 5. 1. 1) and requirements for securing the interface between container and processing equipment or wafer transportation equipment. This Standard specifies the requirements for wafer spacers used for separation of wafers
