P01700 - SEMI P17 - Determination of Iron, Zinc, Calcium, Magnesium, Copper, Boron, Aluminum, Chromium, Manganese, and Nickel in Positive Photoresist Metal Ion Free (MIF) Developers by Inductively Coupled Plasma Emission Spectroscopy (ICP) StdPbc-0115 This Guide provides reference to

This Guide provides reference to other relevant SEMI Standards that ensure quality and reliability of UPW systems

the resulting square field is narrower but taller than the 22-character rectangular one

Standardization of pump interfaces will allow for interchangeability of pumps

本文書は，SEMI D18「フラットパネルディスプレイ基板の水平搬送と格納に使用されるカセットの仕様」から関連する寸法データを取り入れている。

SEMI E132-1104 (technical revision)

P01700 - SEMI P17 - Determination of Iron, Zinc, Calcium, Magnesium, Copper, Boron, Aluminum, Chromium, Manganese, and Nickel in Positive Photoresist Metal Ion Free (MIF) Developers by Inductively Coupled Plasma Emission Spectroscopy (ICP) StdPbc-0115 This Guide provides reference toThis standard was technically reapproved by the Resist Committee and is the direct responsibility of the North American Microlithography Committee. Current edition approved by the North American Regional Standards Committee in October 1998. Initially available at www. semi. org February 1999; to be published February 1999. Originally published in 1992; previously published in 1996. NOTICE: This Standard or Safety Guideline has an Inactive Status