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SEMI E5-94 (technical revision)
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E19500 - SEMI E195 - Test Method Using Adhesive Replacement Substrates to Assess Particulate Surface Contamination on Critical Chamber Components Revision:SEMI E195-0925 - Current SEMI E5-94 (technical revision)1 Purpose 1. 1 This Test Method describes a quantitative analysis method to measure the ISO 14644 9 surface cleanliness for particle concentration (SCP) of a critical chamber component (CCC) by means of an adhesive replacement substrate (ARS), which removes particles from the CCC surfaces of interest. The ARS is subsequently measured with a scanning surface inspection system (SSIS), typically a scatterometer, for particle counting, and with scanning
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