C08900 - SEMI C89 - Test Method for Particle Removal Performance of Liquid Filter Rated Below 30 nm with Inductively Coupled Plasma – Mass Spectroscopy (ICP-MS) StdDcs-Withdrawn SEMI D42-0305 (first published)

SEMI D42-0305 (first published)

This Guide supports the approach by off-line measurement of the contaminants using best available techniques available in the laboratory setting

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1  The purpose of this Standard is to standardize requirements for ammonium fluoride 40% used in the semiconductor industry and testing procedures to support those standards

SEMI C20-0301 (technical revision)

C08900 - SEMI C89 - Test Method for Particle Removal Performance of Liquid Filter Rated Below 30 nm with Inductively Coupled Plasma – Mass Spectroscopy (ICP-MS) StdDcs-Withdrawn SEMI D42-0305 (first published)This Document is to provide a standard of mono dispersed gold nanoparticle (GNP) challenge test for liquid filter rated below 30 nm using inductively coupled plasma mass spectroscopy (ICP MS). This Document covers a mono dispersed GNP challenge test method for below 30 nm rated liquid filter. This Document defines a test condition for mono dispersed GNP challenge test. The following areas are to be addressed in this Document: The test condition such