E00100 - SEMI E1 - Specification for Open Plastic and Metal Wafer Carriers StdPbc-0413 SEMI E140 — Guide to

SEMI E140 — Guide to Calculate Cost of Ownership Metrics for Gas Delivery Systems

originally published in 1983

This Document is intended to define the reference planes for the dimensions of the carriers and the load port features that will interact with the carriers

previously published November 2010

低レベルのデバイスの知性へのアクセス

E00100 - SEMI E1 - Specification for Open Plastic and Metal Wafer Carriers StdPbc-0413 SEMI E140 — Guide toNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification provides the dimensional requirements for plastic and metal wafer carriers used for the processing and handling of 3 in., 100 mm, 125 mm, and 150 mm diameter wafers. It also includes some related