MF152700 - SEMI MF1527 - Guide for Application of Certified Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon StdPbc-1217 visual) evaluation of corrosion resistance

visual) evaluation of corrosion resistance

This Specification is directed specifically to germanium wafers with one or both sides polished

SEMI E88-0307 (Reapproved 0318)

the batch and the batch location are defined

또한 데이터 수집 계획이 어떠한 형태를 가지는지

MF152700 - SEMI MF1527 - Guide for Application of Certified Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon StdPbc-1217 visual) evaluation of corrosion resistanceThis Guide covers the application of certified reference materials (CRMs) for resistivity measurements on silicon wafers. Specifically, this Guide covers the use of these CRMs for preparing resistivity reference wafers and for ensuring the quality of the instrumentation used for preparing them. The Guide covers the selection of materials for resistivity reference wafers, procedures for preparing and calibrating resistivity reference wafers, and use of