E08300 - SEMI E83 - Specification for PGV Mechanical Docking Flange Revision:SEMI E83-0714 - Superseded 3D angular luminance uniformity

3D angular luminance uniformity

SEMI E125-1104 (technical revision)

The Redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded)

The function of the specifications is to establish desired standards of quality

Perfluoromethylether-based Perfluoro-alkoxy (MFA) and powders of polytetrafluoro-ethylene (PTFE)

E08300 - SEMI E83 - Specification for PGV Mechanical Docking Flange Revision:SEMI E83-0714 - Superseded 3D angular luminance uniformityNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification is intended to promote consistent interface features between person guided vehicles (PGV) and equipment with a load port. This Specification defines a mechanical standard for the stationary (equipment)