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org in October 2012
This Specification is directed specifically to indium phosphide wafers with one or both sides polished
SEMI E116-0324 (technical revision)
edges of rigid disk substrates are frequently edge shaped
ジボラン混合ガスの仕様と分析方法を定義し，その仕様の有効性を確認する。
M01800 - SEMI M18 - シリコンウェーハ発注仕様書開発のガdイド StdPbc-1020 org in October 2012NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Silicon Wafer Global Technical Committee2012830global Audits and Reviews Subcommittee20129www. semiviews. org www. semi. org1990200711 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain
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