P01300 - SEMI P13 - Determination of Sodium and Potassium in Positive Photoresists by Atomic Absorption Spectroscopy Lang-English 1-0921 (technical revision)

1-0921 (technical revision)

SEMI MF523-1107 (Reapproved 1012)

their purity has been shown to affect the device yield during the manufacturing processes

SEMI C30 — Specification for Hydrogen Peroxide

SEMI PV58-0115 (first published)

P01300 - SEMI P13 - Determination of Sodium and Potassium in Positive Photoresists by Atomic Absorption Spectroscopy Lang-English 1-0921 (technical revision)This standard was technically approved by the Global Micropatterning Committee and is the direct responsibility of the North American Micropatterning Committee. Current edition approved by the North American Regional Standards Committee on July 11, 2004. Initially available at www. semi. org September 2004; to be published November 2004. Originally published in 1991. NOTICE: This Standard or Safety Guideline has an Inactive Status because the