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This Test Method provides the procedure to determine whether a specific particle deposition system
This Specification is not intended to eliminate the need for traditional paper (or equivalent) equipment interface documentation
however this test can also be performed with other gasses
Measurements can be made on any specimen for which reliable resistivity measurements can be obtained
The Test Method is applicable to categories of wafers specified in SEMI M1 used in advanced IC manufacturing
E02300 - SEMI E23 - Specification for Cassette Transfer Parallel I/O Interface Revision:SEMI E23-1104 - Superseded This Test Method provides theNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. Cassette transfer between process equipment and transport equipment is performed by means of a mechanical operation in the interactive area and requires quick response and reliable interlock signals. The purpose of this
