F11500 - SEMI F115 - Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components StdTpc-Terminology This Practice covers the surface

This Practice covers the surface preparation of silicon samples using diamond polishing prior to measurement of resistivity variations by the spreading resistance technique

本測定方法は，

本スタンダードは，global Information & Control Committeeで技術的に承認されている。現版は2007年12月20日，global Audits and Reviews Subcommitteeにて発行が承認された。2008年2月にwww

SEMI G43 — Test Method for Junction-to-Case Thermal Resistance Measurements of Molded Plastic Packages

SEMI E121-0304 (technical revision)

F11500 - SEMI F115 - Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components StdTpc-Terminology This Practice covers the surfaceThis Document defines a test method for determining metallic elements present on the wetted surfaces of ultra high purity (UHP) chemical delivery systems and components. This Test Method is applicable to UHP chemical delivery systems and components. Examples of test samples include valves, regulators, filters, mass flow controllers, tubing, weld fittings, and face seal fittings. This Test Method could also be used to determine the contamination