M04700 - SEMI M47 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI Applications Revision:SEMI M47-0707 (Withdrawn 1110) - Withdrawn SEMI E41 — Exception Management

SEMI E41 — Exception Management (EM) Standard

This Standard was technically approved by the global Automated Test Equipment Technical Committee

Originally published September 1998

6 100mm鏡面研磨単結晶シリコンウェーハ（セカンダリフラットあり，625m m 厚）

for which basic measurement instrumentation and capability exists that

M04700 - SEMI M47 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI Applications Revision:SEMI M47-0707 (Withdrawn 1110) - Withdrawn SEMI E41 — Exception ManagementThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 25, 2007. Initially available at www. semi. org in October 2010. Originally published November 2001; previously published July 2007. NOTICE: This document was balloted and approved for withdrawal in 2010. This specification defines thin layer silicon on insulator (SOI) wafer