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Definition of subsystem energy saving mode operation in the form of a state model
· Chillers and cryo pumps
reliability
the Current version is the official and authoritative version
SEMI C28-0306 (technical revision)
E17400 - SEMI E174 - Specification for Wafer Job Management (WJM) Revision:SEMI E174-0817 - Superseded Definition of subsystem energy savingThe purpose of this Standard is to provide a communication method which observes and or controls every single wafer (including its related information) on equipment individually (and independently rather than a member of a lot) through single management point from the host. The purpose of this Standard is to introduce Wafer Job (WJ) in order to observe and or control a wafer (and its information including context information from related actions such
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