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This standard specifies selected requirements of the cassettes used to ship flat panel substrates from the substrate finisher to the display maker and between process-added users
orgで入手可能となる。初版は1995年発行。前版は2005年11月発行。
The Guide results should be representative of full-scale applications
colorless liquid which hydrolizes in the presence of moisture
Current edition approved by the Japanese Regional Standards Committee on June 1
C09100 - SEMI C91 - Test Method for Determination of Moisture Dry-Down Characteristics of Gas Delivery Components StdTpc-Gases - Specialty This standard specifies selected requirementsNOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI F118. This Test Method describes the procedure for determination of the moisture dry down characteristics of components used in gas delivery systems. The results of this test can be used for the qualitative ranking of gas delivery components based on the design as it relates to moisture dry down performance of the system. This Test Method
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