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Applicable display sizes are from Type
This Guide describes procedures for measuring filter particle retention while using UPW as the test media
SEMI MF1618-1110 (Reapproved 0322)
ambient atmosphere
Some of the elements and attributes in the schema file are exclusively for documenting SECS-II messages
G00600 - SEMI G6 - Test Method for Seal Ring Flatness Revision:SEMI G6-89 - Inactive Applicable display sizes are fromNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification covers the method for determining the maximum deviation between the seal ring and a reference plane defined by three fixed points on the seal ring. This method will not work on parts smaller than 0. 330
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