C05100 - SEMI C51 - Specification for Xylenes Revision:SEMI C51-0114 (Reapproved 1119) - Inactive Alternative methods may be used

Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation

This method provides a uniform procedure to determine the tensile strength applied to welded connections made by PFA weld fitting

SEMI E1 — Specification for 3

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specifications

C05100 - SEMI C51 - Specification for Xylenes Revision:SEMI C51-0114 (Reapproved 1119) - Inactive Alternative methods may be usedThe purpose of this Document is to standardize requirements for xylene used in the semiconductor industry and to document testing procedures to support this Standard. Test methods have been shown to give statistically valid results. The scope of this Document is a grade of xylene used in the semiconductor industry. This material is a mixture of ortho, meta, and para isomers and ethyl benzene. Xylene (o , m , and p isomers) 99. 0% min and Ethyl benzene