D08800 - SEMI D88 - Specification for Electrostatic Properties of FPD Photomasks and Blanks Package StdPbc-0518 This Safety Guideline applies to

This Safety Guideline applies to semiconductor manufacturing equipment

This Standard applies to compact size two-port/two-fastener components (except mass flow controllers and mass flow meters)

the depth of the etch

Originally published February 2000

SEMI C56-1116 (technical revision)

D08800 - SEMI D88 - Specification for Electrostatic Properties of FPD Photomasks and Blanks Package StdPbc-0518 This Safety Guideline applies to1 Purpose 1. 1 This Standard specifies the electrostatic properties required for cases used for transportation of photomasks and blanks used in FPD manufacturing to reduce the risk of electrostatic discharge (ESD) damage to photomasks and blanks during transportation or storage. 2 Scope 2. 1 This Standard provides the specifications of the electrostatic properties of the basic packaging of cases used for transportation of photomasks and blanks used in