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It was available at www
2 This standard specifies procedures to measure extractable metal impurities from perfluoroalkoxy alkane (PFA) and other fluorinated materials and from high purity liquid distribution components
originally published February 2008
BWSs may be classified as either temporarily bonded (i
本文書の範囲は半導体産業で使用されるトランス1，2ジクロロエチレンの提案された不純物限度の一覧作成である。
C06200 - SEMI C62 - Specification for Progen Precursors Used in Low K CVD Processes Revision:SEMI C62-1107 - Superseded It was available at wwwThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www. semiviews. org and www. semi. org in June 2018; originally published November 2007; previously published March 2009. The purpose of this Document is to provide specifications for porogen precursors used in Low K CVD processes for which
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