D04400 - SEMI D44 - Specification for Reference Position of Single Substrate for Handing Off On Tool Revision:SEMI D44-0706E - Inactive and resultant particle size and

and resultant particle size and count are addressed in this Guide

Notice: This translation is a REFERENCE COPY ONLY

SEMI C88-0815 (first published)

IDもしくはレジンIDと呼称するが，区別の不必要な場合には総称として基板IDと呼ぶ。

but not exclusively

D04400 - SEMI D44 - Specification for Reference Position of Single Substrate for Handing Off On Tool Revision:SEMI D44-0706E - Inactive and resultant particle size andThis standard was technically approved by the global Flat Panel Display Factory Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 16, 2006. It was available at www. semi. org in June 2006. E This standard was editorially modified in February 2007 to correct an error. Changes were made to 6. 2. 2. 4. This standard defines the datum line that specifies the position of the FPD manufacturing equipment,