S02100 - SEMI S21 - 作業者保護のための安全ガイドライン Revision:SEMI S21-1106E (Reapproved 0612) - Superseded Most of the requirements given

Most of the requirements given in this Specification are in the form of maximum or minimum dimensions with very few required surfaces

SEMI M38-0999 (first published)

SEMI E30-0717 (technical revision)

use of this marking symbol will facilitate the future elimination of the numerous types of OC cut shapes presently in use

Continued scaling of CMOS integrated circuit dimensions is reaching a point where materials changes as well as lithographic advances are required to meet the projections of Moore’s Law and the International Technology Roadmap for Semiconductors

S02100 - SEMI S21 - 作業者保護のための安全ガイドライン Revision:SEMI S21-1106E (Reapproved 0612) - Superseded Most of the requirements givenglobal Environmental Health & Safety Technical Committee2012221global Audits and Reviews Subcommittee20126www. semiviews. org www. semi. org20031020072 FPD FPD FPD 1 2 3 4 5 6 7 8 9 10 11 Referenced SEMI Standards SEMI F34 Guide for Liquid Chemical Pipe Labeling SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S8 Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment SEMI