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本仕様は，自動ポッド操作を可能にするポッドハンドルのための一体構造および配置を規定するものである。
This guideline is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces
향상된 기능에는 연속적인 핸드오프(handoff)
The characteristic shape and magnitude of oxygen concentration distributions in crystals are functions of the crystal growth process
hereinafter collectively referred to as CC-Link IE
F00400 - SEMI F4 - Specification for Pneumatically Actuated Cylinder Valves StdPbc-0323 本仕様は，自動ポッド操作を可能にするポッドハンドルのための一体構造および配置を規定するものである。NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification establishes the minimum design and performance requirements for pneumatically actuated cylinder valves used in semiconductor manufacturing. It is also intended as an aid in the procurement of these
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