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• Description of the specification conventions used
and other detail appropriate for the model of an equipment’s structure as viewed by a factory host application through the available communication interfaces
performance
process and building automation
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
E02800 - SEMI E28 - マスフローコントローラの圧力仕様のガイドライン StdPbc-0116 • Description of the specificationglobal Gases Committee2010430global Audits and Reviews Subcommittee20106www. semi. org1992200411 Referenced SEMI Standards SEMI E12 Standard for Standard Pressure and Standard Temperature for Flow Units Used in Mass Flow Meters and Mass Flow Controllers
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