MF039900 - SEMI MF399 - Test Method for Thickness of Heteroepitaxial or Polysilicon Layers Revision:SEMI MF399-00a (Withdrawn 0710) - Withdrawn - Historical it is anticipated that most

it is anticipated that most device manufacturers will require most of the GEM capabilities that apply to a particular type of equipment

このガイドの目的は，マスフローコントローラ(MFCs)漏洩率の記述および測定のための統一された世界的にも通用する方法を確立することである。ガス受渡しシステムの漏洩を完全になくすことは，製品の質および性能を維持するうえで重要なことである。このガイドは，製造者およびユーザの間の混乱と誤解を防止するように考えられている。特に機械的な原因による漏洩率と拡散による漏洩率とを区別している。

2-1224 (Reapproved 1225)

SEMI T20-1108 (first published)

여기서 정의하는 통신 서비스는 독립적인 시스템의 표준에 근거하는 상호 운용을 가능하게 하고

MF039900 - SEMI MF399 - Test Method for Thickness of Heteroepitaxial or Polysilicon Layers Revision:SEMI MF399-00a (Withdrawn 0710) - Withdrawn - Historical it is anticipated that mostThis standard was originally published by ASTM International as ASTM F399 74T. It was formally approved by ASTM balloting procedures and adhered to ASTM patent requirements. Though ownership of this standard has been transferred to SEMI, it has not been formally approved by SEMI balloting procedures and does not adhere to either SEMI Regulations dealing with patents, or SEMI Style Manual. Available at www. semi. org in June 2010. Originally published