E08700 - SEMI E87 - 캐리어 관리 사양 StdTpc-Fire Safety SEMI M53-0706 (technical revision)

SEMI M53-0706 (technical revision)

This Specification does not require that the metadata provided by the equipment be directly human readable

is outlined as part of the test method and alternative

このスタンダードは，半導体製造装置運用に関する領域をカバーする。

These mounting requirements may be used in other tools used to fabricate or measure EUV masks

E08700 - SEMI E87 - 캐리어 관리 사양 StdTpc-Fire Safety SEMI M53-0706 (technical revision)Global Information & Control Technical Committee , 2012 12 20 Global Audits and Reviews Subcommittee . 1995 2008 7 . 2013 4 www. semi. org . (coordination), (execution), (completion) . SEMI E15. 1 300 mm . (Document) , (Standard). (Document) : AMHS (vehicles) CarrierID (Carrier) Subordinate Document: SEMI E87. 1 0707 Provisional Specification for SECS II Protocol for Carrier Management (CMS) Referenced SEMI Standards SEMI E15 Specification for Tool