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orgで入手可能となる。初版は1995年発行。前版は2005年11月発行。
The scope of this Standard is limited to identifying key EQIPs for select equipment process types
This Standard is intended to eliminate confusion and provide for a common language which users and manufacturers can employ to discuss MFC/MFM calibration
SEMI E90-1102 (technical revision)
E14300 - SEMI E143 - Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any phase Angle Revision:SEMI E143-0306 (Reapproved 0512) - Superseded the price drops to $240The purpose of this Test Method is to provide an accurate method for measuring the output power and spectral content of radio frequency (RF) generators being driven into both matched and mismatched loads to simulate their actual performance in RF power delivery systems for semiconductor processing equipment to support SEMI E113. This Test Method specifies the testing procedures and test equipment required for precisely determining the output power and
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