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SEMI E120-0414 (technical revision)
This Specification defines a mechanical standard for the stationary (equipment) side of the docking flange used by PGVs
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The purpose of this Document is to specify a method to measure the carrier concentration and carrier concentration vs
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E06200 - SEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) StdPbc-1223 SEMI E120-0414 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the tool side of the interface between a process or metrology tool and a front opening box. This Standard is intended to set an appropriate level of specification that places minimal limits on
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