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C00334 - SEMI C3.34 - Specification for Disilane (Si2H6) in Cylinders, 97% Quality StdPbc-0619 AMHS (including equipment

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Description

AMHS (including equipment

本仕様は,

The purpose of this Document is to standardize requirements for xylene used in the semiconductor industry and to document testing procedures to support this Standard

If differences should exist between the redline document and the Current document

減圧器は,制御されない場合,多数の人工的パーティクルを疑集,疑縮を通して生じ得ることが知られている。この生成を防ぐために,この仕様は200 bar (3000 psi) までの圧力において稼働するパーティクルカウンターを採用し,圧力逓減とそれに関連する問題に対する必要を無くしている。

C00334 - SEMI C3.34 - Specification for Disilane (Si2H6) in Cylinders, 97% Quality StdPbc-0619 AMHS (including equipmentThe purpose of this Standard is to provide a specification for disilane (Si2H6) used in the semiconductor industry. This Standard covers requirements for disilane (Si2H6) used in the semiconductor industry. If analytical methods are not complete, the requirements are presented as a guideline. Referenced SEMI Standards (purchase separately) SEMI C3 Specification for Gases Revision History SEMI C3. 34 0116 (Reapproved 0922) SEMI C3. 34 0116 (technical

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