M05900 - SEMI M59 - Terminology for Silicon Technology StdTpc-Electronic Data Interchange or gaseous source

or gaseous source

1-0699 (technical revision)

SEMI MF1527-02 (first SEMI publication)

本标准的目的是制定一种快速准确的测试方法，通过称重法测试晶体硅片腐蚀速率的方法。

SEMI C29 — Specifications and Guide for 4

M05900 - SEMI M59 - Terminology for Silicon Technology StdTpc-Electronic Data Interchange or gaseous sourceNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. Silicon technology underlies the integrated circuit and device industry. To promote common understanding and correct communication between suppliers and customers and others in the field, terms used in this field should be