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E12800 - SEMI E128 - XML メッセージ構造に関する仕様 StdPbc-1121 A standard interface will increase

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Description

A standard interface will increase interchangeability of Carrier ID Reader/Writers so that users and equipment suppliers have a wider range of choices

org in September 1999

この文書の範囲は,

The scope of this Document covers high purity zirconium tert-butoxide which is used in the semiconductor industry for the deposition of zirconium oxide based layers by atomic layer deposition or chemical vapor deposition

Each of these layers has various properties which may need to be specified

E12800 - SEMI E128 - XML メッセージ構造に関する仕様 StdPbc-1121 A standard interface will increaseglobal Information & Control Committee20091216global Audits and Reviews Subcommittee20102www. semi. org2003720067 XMLSEMIXMLXMLXMLXMLXML XML2 XMLXMLSEMI XML W3C Simple Object Access ProtocolSOAP SEMISOAP SOAP SOAP 2 XMLXMLXML Referenced SEMI Standards SEMI E125 Specification for Equipment Self Description (EqSD) SEMI E134 Specification for Data Collection Management

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