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M06400 - SEMI M64 - 赤外線吸収スペクトル法による絶縁(SI)ガリウムヒ素単結晶内のEL2深いドナー濃度の試験方法 StdPbc-0118 information exchange

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which will subsequently have much lower stiffness

orgで入手可能となる。初版は2003年7月発行,前版は2006年7月に発行された。

注意: 本文書は,編集上の修正を伴い再承認された。

chemical dilutions

M06400 - SEMI M64 - 赤外線吸収スペクトル法による絶縁(SI)ガリウムヒ素単結晶内のEL2深いドナー濃度の試験方法 StdPbc-0118 information exchangeglobal Compound Semiconductor Committee20051129global Audits and Reviews Subcommittee20061www. semi. org20063CD ROM SI GaAsEL2 Referenced SEMI Standards SEMI M39 Test Method for Measuring Resistivity and Hall Coefficient and Determining Hall Mobility in Semi Insulating GaAs Single Crystals

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